Allen, James J. <br/><br/>
Micro electro mechanical system design / 
James J. Allen. 
 - Boca Raton :  Taylor & Francis,  2005. 
 - 465 p. :  ill. ;  23 cm. 
 - Mechanical engineering ;  192. .
 - Mechanical engineering (Taylor & Francis) ;  192. .
<br/><br/>Incluye referencias bibliográficas e índice. 
<br/><br/>Ch. 1. Introduction -- Ch. 2. Fabrication processes -- Ch. 3. MEMS technologies -- Ch. 4. Scaling issues for MEMS -- Ch. 5. Design realization tools for MEMS -- Ch. 6. Electromechanics -- Ch. 7. Modeling and design -- Ch. 8. MEMS sensors and actuators -- Ch. 9. Packaging -- Ch. 10. Reliability. 
<br/><br/><label>ISBN: </label>0824758242 (alk. paper) 9780824758240 (alk. paper) 
<br/><br/><label>LCCN: </label>2005041771 
<br/><br/><label>Nat. Bib. No.: </label>GBA504453  bnb 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Primera Jornada de Catalogacion.<br/>Mecatrónica.<br/>Sistemas microelectromecánicos.<br/>Robótica.<br/>Sistemas microelectromecánicos--Diseño y construcción.<br/>Diseño en ingeniería.<br/>Tecnología electromecánica.<br/>Microelectromechanical systems--Design and construction.<br/>Engineering design.
<br/><br/><label>LC Class. No.: </label>TK 153  / A425m 2005 
<br/><br/><label>Dewey Class. No.: </label>621