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Micro electro mechanical system design / James J. Allen.

By: Material type: Computer fileComputer fileSeries: Mechanical engineering (Taylor & Francis) ; 192.Publication details: Boca Raton : Taylor & Francis, 2005.Description: 465 p. : ill. ; 23 cmISBN:
  • 0824758242 (alk. paper)
  • 9780824758240 (alk. paper)
Subject(s): DDC classification:
  • 621
LOC classification:
  • TK 153 A425m 2005
Online resources:
Contents:
Ch. 1. Introduction -- Ch. 2. Fabrication processes -- Ch. 3. MEMS technologies -- Ch. 4. Scaling issues for MEMS -- Ch. 5. Design realization tools for MEMS -- Ch. 6. Electromechanics -- Ch. 7. Modeling and design -- Ch. 8. MEMS sensors and actuators -- Ch. 9. Packaging -- Ch. 10. Reliability.
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Holdings
Item type Current library Home library Collection Shelving location Call number Copy number Status Date due Barcode
Libro Libro Biblioteca Juan Bosch Biblioteca Juan Bosch Colección de Tecnología Humanidades (4to. Piso) TK 153 A425m 2005 (Browse shelf(Opens below)) 1 Available 00000092712

Incluye referencias bibliográficas e índice.

Ch. 1. Introduction -- Ch. 2. Fabrication processes -- Ch. 3. MEMS technologies -- Ch. 4. Scaling issues for MEMS -- Ch. 5. Design realization tools for MEMS -- Ch. 6. Electromechanics -- Ch. 7. Modeling and design -- Ch. 8. MEMS sensors and actuators -- Ch. 9. Packaging -- Ch. 10. Reliability.

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