Micro electro mechanical system design / James J. Allen.
Material type:
- 0824758242 (alk. paper)
- 9780824758240 (alk. paper)
- 621
- TK 153 A425m 2005
Contents:
Ch. 1. Introduction -- Ch. 2. Fabrication processes -- Ch. 3. MEMS technologies -- Ch. 4. Scaling issues for MEMS -- Ch. 5. Design realization tools for MEMS -- Ch. 6. Electromechanics -- Ch. 7. Modeling and design -- Ch. 8. MEMS sensors and actuators -- Ch. 9. Packaging -- Ch. 10. Reliability.
Item type | Current library | Home library | Collection | Shelving location | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|---|---|---|
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Biblioteca Juan Bosch | Biblioteca Juan Bosch | Colección de Tecnología | Humanidades (4to. Piso) | TK 153 A425m 2005 (Browse shelf(Opens below)) | 1 | Available | 00000092712 |
Incluye referencias bibliográficas e índice.
Ch. 1. Introduction -- Ch. 2. Fabrication processes -- Ch. 3. MEMS technologies -- Ch. 4. Scaling issues for MEMS -- Ch. 5. Design realization tools for MEMS -- Ch. 6. Electromechanics -- Ch. 7. Modeling and design -- Ch. 8. MEMS sensors and actuators -- Ch. 9. Packaging -- Ch. 10. Reliability.
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